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SPIN200i spin coater
$0.00
The SPIN200i is a affordable single substrate spin coater. This spin coater is perfectly suitable for a wide range of applications, including drying, rinsing, cleaning, and coating.
For all the products that you request and put in your cart you first receive a price quote before it becomes an order.
SPIN200i spin coater
$0.00
Description
SPIN200i spin coater for spin coating and developing
This table top spin coater is seamless build in a full-plastic, housing in natural polypropylene (NPP) or optional PTFE, and is suitable for processing fragments as small as 5 mm up to substrates sizes up to Ø 200 (or 8”) or 6″ x 6″. The units are operated via an easy to use, detachable colour touch-screen that offers intuitive programming and recipe storage. A variety of nozzles, megasonic cleaning and dispense lines can be added as options.
The SPIN200i for up to 200 mm substrates includes vacuum chuck for FREE.
Additional information
| Wafer Size | 4"x4", 6" (150mm) |
|---|---|
| Max. substrate diameter | 260mm round or 6ʺ x 6ʺ square |
| Max. process chamber diameter | 302 mm |
| System Type | Table-Top System |
| Height | 250 mm |
| Width | 274 mm |
| Depth | 451 mm |
| Shipping weight | 20 kgs |
| Shipping dimension | 680 x 580 x 480 mm |
| Available number of programs | Unlimited * |
| Steps per program | Unlimited * |
| Spin speed* | 1 – 12,000 rpm ** ± 1rpm steps |
| Spin speed accuracy | ± 0.1 rpm ** |
| Spin rotational direction | Clockwise, Counter clockwise Puddle |
| Max. acceleration | 30,000 rpm/sec ** |
| Spin time | Unlimited*, ± 0.1 seconds steps |
| Free programmable outputs | 3 pcs, relays, nominal switching capacity 0.5A /125 VAC – 0.3A / 60DC |
| Housing material | Natural Polypropylene (NPP) *** |
| Process chamber material | Natural Polypropylene (NPP) *** |
| Interface | Detachable, full-size touchscreen, glove-friendly,IP52, chemical resistant |
| External connection | 1 USB Port in the controller |
| Voltage | 100 – 120 VAC / 200 – 240 VAC 50/60 Hz (auto select) |
| Power consumption | Max. 500 W |
| Max. current | 5A / 2,5A |
| Vacuum | – 65 kPa (-19 inchHg), ≥ 80 lpm Tube OD Ø8 mm |
| Motor purge gas | 20 – 50 kPa, 2-5 l/min, Tube OD Ø 6 mm |
| Drain connection | 1” M-NPT |
| NOTE | * Considering additional capability of standard unit such as USB backup, recipe cycling, PC software etc. |
| Color | White |
| Material | Teflon®PTFE, Natural Polypropylene NNP |
| Process | Photolithography, Wetprocess |
