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Description
Sapphire MegPie Megasonic Transducer
The sapphire MegPie is a single-wafer megasonic transducer for cleaning and sonochemical processing. It applies a uniform dose of acoustic energy to a rotating substrate. The MegPie will improve process efficiency and lower process time.
Features & benefits:
- Particle-neutral sapphire resonator – no particles added to the process
- Patented crystal bond to the resonator
- Patented RF connection to the crystal
- Redundant internal RTO temperature monitoring
- Available in 100 mm – 450 mm+
- Custom sizes available
- Sapphire resonator compatible with all processing chemistries
- Uniform direct acoustic energy applied to the process
- Increased process efficiency
- Reduced process time and chemistry usage
- No moving parts, no consumables
- Replaces brushes and nozzles
Additional information
| Applications MegPie | Etch assist, Lift off, LIGA processes, Mask cleaning, Plating pre-cleaning, Post-CMP cleaning, Post-laser cleaning, Pre-plating bubble removal, Pre-SOIC bond cleaning, Resist strip, SU-8 develop, TSV processing |
|---|---|
| Color | No Color Option |
| Material | No Material Option |
| Process | Wetprocess |
