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The MicroMaster is a versatile UV laser writer with high precision components, specifically designed to give the user the highest degree of freedom to create micro structures in photo sensitive layers. The MicroMaster base system is a fully operating system. It includes a 405 nm optical module capable of writing structures as small as 0.8μm in photo resist layers.
For all the products that you request and put in your cart you first receive a price quote before it becomes an order.
|Stroke scan & step||
Max. 115 mm
< 50 nm RMS
Max 200 mm/s
< 1 μm over 100 mm
0 – 10 mm
|Max. substrate size||
Min. 5 x 5 mm, max. 125 x 125 mm
Max. 110 x 110 mm (speed dependent)
5 -7 Bar, Air quality according ISO8573-1:2010 class 3 or better
Min. 800 nm
Selectable. Standard: 60 nm in scan direction and 200 nm in step direction.
– Capacity up to 4" x 4" substrates
No Color Option
No Material Option