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MicroMaster Base System – UV Direct Laser Writer
$0.00
The MicroMaster is a versatile UV laser writer with high precision components, specifically designed to give the user the highest degree of freedom to create micro structures in photo sensitive layers. The MicroMaster base system is a fully operating system. It includes a 405 nm optical module capable of writing structures as small as 0.8μm in photo resist layers.
For all the products that you request and put in your cart you first receive a price quote before it becomes an order.
MicroMaster Base System – UV Direct Laser Writer
$0.00
Additional information
| Wafer Size | 4" (100mm) |
|---|---|
| System Type | Table-Top System |
| Width | 580 mm |
| Height | 708 mm |
| Depth | 600 mm |
| Weight | 260 kg |
| Stroke scan & step | Max. 115 mm |
| Repeatability | < 50 nm RMS |
| Encoder resolution | 2.5 nm |
| Scan speed | Max 200 mm/s |
| Straightness axis | < 1 μm over 100 mm |
| Wafer thickness | 0 – 10 mm |
| Max. substrate size | Min. 5 x 5 mm, max. 125 x 125 mm |
| Exposable area | Max. 110 x 110 mm (speed dependent) |
| Compressed air | 5 -7 Bar, Air quality according ISO8573-1:2010 class 3 or better |
| CD | Min. 800 nm |
| Address grid | Selectable. Standard: 60 nm in scan direction and 200 nm in step direction. |
| Specification Including | – Capacity up to 4" x 4" substrates |
| Color | No Color Option |
| Material | No Material Option |
| Process | Photolithography |
