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Direct Laser Writer - 275nm spot size! 2x capability of nearest competitor, with lowest CoO. Mask Aligner - best-in-class specification with unbeatable value proposition. Spin Coater / Developer - precision motor control ±0.1rpm, polypro or Teflon® ultra-clean construction.
Refurbish your existing tool? Finding the right part? Dedication towards our customers and flexibility in finding the right solution, combined with application knowledge and fast supply logistics.
Fast supply from stock? SPS-Europe stock well over 9,000 parts for wafer handling, vacuum wands, wafer shipping boxes to in-line heaters, chemical pumps and fittings for wet process applications.
Looking for a 1:1 replacement? Or improve on your existing semiconductor equipment? We offer original OEM-parts for wet process equipment, robot refurbishment and Semitool upgrades.
`` I would like to thank SPS (Rein de Groot, Alessandro Barilaro, and many others) for a great collaboration, starting from the first ideas for developing a modular, flexible tool for precise bulk silicon wet etching, till its final installation and setup. ``
``I have been using the Midas mask aligner MDA-400LJ system for half a year, and I am quite happy to work with it. The LED light source makes the exposure condition highly reproducible, and the fully-manual operation is also convenient. I think it is a good and affordable choice for labs which use photolithography occasionally and not dedicated to it.``
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